Bekaert: Rotatable Magnetron Sputtering Target Technology

Bekaert, a Belgium-based metal transformation and coating technologies company, has developed rotatable magnetron sputtering target technology that lowers cost of ownership through longer production runs, faster coating deposition and a more complete use of coating material. Bekaert’s technology can be applied toward architectural and automotive glass, display glass and photovoltaic glass that require a coating process.

Sn-Sputter Targets: Standard thermal sprayed Sn targets have 90% of theoretical density and 2000 ppm oxygen content. Advanced thermal spray technology reaches 99% of theoretical density and just 250 ppm oxygen content. Performance is improved in arc rate, burn-in behavior, deposition rate and I-V grain morphology, grain orientation, and material density.

Thermal spray technology: Specific coatings for specific applications are possible due to manufacturability of doped materials in both stoichiometric and non-stoichiometric compositions. Almost all materials can be sprayed while long-life targets up to 152” can be produced easily.

TiOx Targets: High temperature process allows ceramic Ti-oxide to melt while Ti-oxide is partially reduced transforming it to an electrical conductive phase. Ti-oxide remains conductive at room temperature due to high cooling rates. Ti-oxide targets have higher process stability in reactive processes compared to pure metal Ti targets. PEM-like process control systems are not required and sputter deposition speeds can be improved.

Si(Al) Targets: Inherently flexible target geometry allows multiple sizes and maximizes sputter capacity with target layer thickness up to 9-13mm.

For more technical information and pictures please visit GlassonWeb.

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